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Spectroscopy


Auger Electron Spectroscopy (AES)


Auger electron spectroscopy is a widely used surface analysis technique that has been successfully applied to many diverse fields.

It is an excellent tool for performing surface analysis and for determining elemental composition as a function of depth. It has been shown to be particularly useful for analyzing multilayer nanostructure compositions of films, wires, and other microelectronics components.

Applications:


  • Metallized films
  • Metal coatings
  • Surface oxidation
  • Metal composition as a function of depth

Above: High magnification SEM image of etching resulting from an AES depth profiling experiment. Note the multiple layers exposed in the etched cavity. AES characterizes the elemental composition of the individual layers. The graph represents an AES survey scan for a zinc sulfide layer.




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Metallized coating analysis

A client wanted to know the composition of a metallized film deposited on a polymeric substrate.

When there are more than one layer of a metallized film Auger electron spectroscopy (AES) may be used in conjunction with XPS or independently. For another client XPS was used in conjunction with AES to determine the number of layers and the chemical composition of each layer. AES allows for depth profiling while monitoring elemental composition. AES has been used for detecting metallized coatings up to 50 layers thick, as well as the elemental composition of each layer.



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